Accurion Heavy Duty Vibration Isolation Systems
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- Model: Accurion Heavy Duty Anti-vibration Systems
Vibration isolation systems for large loads from Accurion
Halcyonics Heavy Duty Units: Vario, Duo & Sandwich
Accurion designs and manufactures the Halcyonics range of advanced vibration reduction systems for today's exacting nanotechnologies. Whether it's high-resolution measurement or a high-precision manufacturing process, effective anti-vibration solutions are required to achieve maximum performance.
Active vibration isolation overcomes the limits of passive damping systems, enabling the attenuation of vibrations caused by machinery, people, traffic, even sound waves, that would disturb delicate instruments.
The systems detailed below are designed for medium to large sized applications which are heavy and usually floor mounted.
Vario Series
Applications
- UHV scanning tunneling microscopes
- Scanning electron microscopes
- Langmuir-Blodgett troughs
- Nanoindenting
- Optical profilers
- LCD manufacturing
- Disc mastering
The compact dimensions and flexible application options of the Halcyonics Vario series make it ideal for surface-mounted installations. It has been designed for the isolation of medium to large instruments, offering active damping from 1 Hz. Above 10 Hz, Vario achieves more than 35 dB (98.2 %) vibration isolation.
The Vario supporting elements come in three different lengths and two load capacities; while VarioBasic elements come in three different lengths and three load capacities, and can also be configured for applications requiring multiple support. For example, 6 elements can be used to manage a 900 kg static load.
A major advantage of the Halcyonics active system is the lack of an interfering natural low-frequency resonance as generated by typical passive systems. These have a more or less marked resonant Eigenfrequency, usually in the range from 1 to 5 Hz. As a result, passive systems amplify vibrations in this frequency range whereas the Halcyonics active systems will deliver excellent vibration isolation characteristics at such low frequencies.
Specifications
- Isolation in 6 axes
- For loads up to 600 kg
- Higher loads can be supported using multiple VarioBasic elements
- Automatic load adjustment (VarioBasic is manual)
- Three standard sizes, customisations available
- Low voltage electromagnetic actuators
- No compressed air required
- Modular design with external control unit
- Active vibration isolation from 1 Hz
- Passive vibration isolation above 200 Hz
- Excellent positional stability due to unit's inherent stiffness
- No natural low frequency resonance, so excellent vibration characteristics below 5 Hz
- 2-year warranty
Duo
Applications
- UHV scanning tunneling microscopes
- Scanning electron microscopes
- UHV chambers
- Semiconductor manufacturing machinery
The floor-mounted Halcyonics Duo isolation system has been engineered as modular elements to meet the requirements of the most diverse of applications. Duo can be used in combination with honeycomb-structured platforms, or directly below heavy measuring instruments.
Duo is normally supplied as two elements that can each support 400 kg, but combinations of 3, 4 or more elements are possible to accomodate higher loads.
Specifications
- Isolation in 6 axes
- For loads of 800 kg or more
- Low voltage electromagnetic actuators
- No compressed air required
- Active vibration isolation from 1.0 Hz
- Passive vibration isolation above 200 Hz
- Fast settling time of 300 ms
- No natural low frequency resonance, so excellent vibration characteristics below 5 Hz
- 2-year warranty
Sandwich
Applications
- UHV scanning tunneling microscopes
- Scanning electron microscopes
- UHV chambers
- Semiconductor manufacturing machinery
The solid construction of the Halcyonics Sandwich allows it to deliver active vibration isolation for loads up to 600 kg. This makes the platform ideal for supporting heavy research instruments, such as scanning electron microscopes, on the floor within busy environments.
Specifications
- Isolation in 6 axes
- For loads up to 600 kg
- Low voltage electromagnetic actuators
- No compressed air required
- Active vibration isolation from 1.0 Hz
- Passive vibration isolation above 200 Hz
- Fast settling time of 300 ms
- No natural low frequency resonance, so excellent vibration characteristics below 5 Hz
- 2-year warranty
Accurion Halcyonics Heavy Duty Systems
