Dual-Axis Nanopositioners

XY nanopositioning piezo stages   

nPoint Dual Axis Nanopostioners   

nPoint's specialised piezo-driven flexure-guided nanopositioners are designed for many motion critical operations, such as scanning and position control. Typical precision applications include nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.

The NPXY range of piezo stages offer up 1000 µm of motion depending on model, and their unique flexure-guided designs ensure high resonant frequencies while minimising orthogonality and cross-talk errors.

The nPoint 400 series DSP controllers provide flexibility in programming and allow easy optimisation of piezo system response times for a variety of applications.

Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.

XY Models	NPXY 40-467	NPXY 50-286	NPXY 60-258	NPXY 90-498
< 99 µm of motion
Key features:	For optics Small & light	Compact High resonance	Non-magnetic UHV compatible	Fast response
Footprint (mm)	25 x 25	60 x 60	70 dia.	84 x 84
Height (mm)	12.5	25	30	18
Aperture (mm)	None	20 dia.	30 dia.	27 dia.
Body Material	Stainless Steel		Aluminium	Stainless Steel
Maximum Load (kg)	0.1	1
Stage Mass (kg)	0.25	0.38		0.52
Max Push/Pull Force (N)	10/1.5	100/20		100/70
Closed-loop Travel (µm)	40	50	60	90
Open-loop Travel* (µm)	50	70		120
Position Noise (nm)	2	0.2	0.4	0.5
Stiffness (N/µm)	1.4	8		2.3
Resonant Freq. (kHz)   X-axis   Y-axis	0.735 0.84	1.4 1.4	0.75 0.75	0.9 0.9
Linearity Deviation (%)	0.1	0.01	0.03	0.01
Settling Time (ms)	4.5	4	5	4
Capacitance (µF)		2.8		4.3
Integrated Sensor	Strain Gauge	Capacitive		Capacitive
Controller	LC.402
Notes	* Open-loop Travel operating at -30 to 150 V

XY Models	NPXY 100-100	NPXY 100-126	NPXY 200-401	NPXY 200-101
< 199 µm of motion
Key features:	Ultra-precise For metrology	Low profile Large aperture	Low profile Large aperture	Ultra-precise For metrology
Footprint (mm)	100 x 100	140 x 140	140 x 140	100 x 100
Height (mm)	23	17	17	23
Aperture (mm)	40 dia.	68 x 68	68 x 68	40 dia.
Body Material	Aluminium
Maximum Load (kg)	1	5	5	1
Stage Mass (kg)	0.46	0.55	0.57	0.46
Max Push/Pull Force (N)	100/20
Closed-loop Travel (µm)	100	100	200	200
Open-loop Travel* (µm)	160	160	250	290
Position Noise (nm)	0.3	0.3	0.7	0.5
Stiffness (N/µm)	1.2	3.3	2.1	0.5
Resonant Freq. (kHz)	0.7	0.85	0.7	0.4
Linearity Deviation (%)	0.01
Settling Time (ms)	6	5	8	15
Capacitance (µF)	2.4	4.8	7.5	3.1
Integrated Sensor	Capacitive
Controller	LC.402
Notes	* Open-loop Travel operating at -30 to 150 V

XY Models	NPXY 250-40	NPXY 300-291
200+ µm of motion
Key features:	For microscopy Low cost	Fast Large aperture
Footprint (mm)	75 x 75	179 x 179
Height (mm)	30	23
Aperture (mm)	40 dia.	85 x 95
Body Material	Mixed†	Aluminium
Maximum Load (kg)	1	5
Stage Mass (kg)	0.35	1.56
Max Push/Pull Force (N)	100/10	100/20
Closed-loop Travel (µm)	250	300
Open-loop Travel* (µm)	340	360
Position Noise (nm)	4	1
Stiffness (N/µm)	0.5	0.7
Resonant Freq. (kHz)   X-axis   Y-axis	0.30 0.23	0.24 0.24
Linearity Deviation (%)	0.05	0.01
Settling Time (ms)   X-axis   Y-axis	10 15	20 20
Capacitance (µF)	3.0	8.2
Integrated Sensor	Strain Gauge	Capacitive
Controller	LC.402
Notes	* Open-loop Travel operating at -30 to 150 V † Mixed material is aluminium and stainless steel

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