Triple-Axis Nanopositioners (Shallow Z-motion)

XYZ nanopositioning piezo stages with shallow Z-motion   

nPoint Triple Axis Nanopostioners (Up to 35 µm Z-motion)   

This range of nPoint 3-axis piezo stages have up to 35 µm of open loop Z-motion, and incorporate a unique flexure-guided design to ensure high resonant frequencies while minimising orthogonality and cross-talk errors.

nPoint's nanopositioners are especially designed for numerous motion critical applications. These include scanning and position control in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.

Flexible DSP controllers enable easy optimisation and configuration of piezo systems for a variety of applications.

Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.

XYZ Models	NPXY100 Z10-128	NPXY200 Z10-269	NPXY50 Z20-477	NPXY60 Z20-257
< 35 µm of open loop Z-motion
Key features:	For microscopy Large aperture	For scanning Large aperture	For AFM etc. Compact	Non-magnetic UHV compatible
Footprint (mm)	140 x 140	140 x 140	60 x 60	70 dia.
Height (mm)	30	30	31	30
Aperture (mm)	68 x 68	68 x 68	None	20 dia.
Body Material	Aluminium		Stainless Steel	Aluminium
Maximum Load (kg)	5	5	1	1
Stage Mass (kg)	0.87	0.96	0.37
Max Push/Pull Force (N)	100/20	100/20	100/10
Closed-loop Travel (µm)   X- & Y-axes:   Z-axis:	100 10	200 10	50 20	60 20
Open-loop Travel* (µm)   X- & Y-axes:   Z-axis:	160 15	240 15	65 35
Position Noise (nm)   X- & Y-axes   Z-axis	0.3 0.1	0.7 0.1	0.2 0.1	0.4 0.2
Stiffness (N/µm)   X- & Y-axes   Z-axis	3.0 6.2	2.8 2.8	3 14
Resonant Freq. (kHz)   X-axis   Y-axis   Z-axis	0.60 0.60 0.90	0.40 0.45 0.90	1.20 1.20 2.00	0.75 0.75 2.00
Linearity Deviation (%)   X- & Y-axes   Z-axis	0.01 0.02	0.01 0.02	0.01 0.10	0.03 0.05
Settling Time (ms)   X- & Y-axes   Z-axis	10 5	15 5	4 2	5 2
Capacitance (µF)   X- & Y-axes   Z-axis	4.8 1.0	7.5 1.0	2.8 1.6	2
Integrated Sensor	Capacitive
Controller	LC.403
Notes	* Open-loop Travel operating at -30 to 150 V

XYZ Models	NPXY100 Z25-102	NPXY100 Z25-264	NPXY200 Z25-103	NPXY200 Z25-260
35 µm of open loop Z-motion
Key features:	For metrology Ultra-precise	For scanning Large aperture	For microscopy Large aperture	For metrology Ultra-precise
Footprint (mm)	100 x 100	140 x 140	100 x 100	140 x 140
Height (mm)	35
Aperture (mm)	38 dia.	68 x 68	38 dia.	68 x 68
Body Material	Aluminium
Maximum Load (kg)	1	1	1	5
Stage Mass (kg)	0.56		0.56	0.96
Max Push/Pull Force (N)	100/10		100/20	100/20
Closed-loop Travel (µm)   X- & Y-axes:   Z-axis:	100 25	100 25	200 25	200 25
Open-loop Travel* (µm)   X- & Y-axes:   Z-axis:	130 35		270 35	240 35
Position Noise (nm)   X- & Y-axes   Z-axis	0.3 0.1	0.3 0.2	0.5 0.1	0.7 0.2
Stiffness (N/µm)   X- & Y-axes   Z-axis	1.3 15.5		0.5 13.1	2.8 2.7
Resonant Freq. (kHz)   X- & Y-axis   Z-axis	0.50 1.60	0.60 0.75	0.35 1.60	0.45 0.75
Linearity Deviation (%)   X- & Y-axes   Z-axis	0.01 0.04	0.02 0.02	0.01 0.04	0.01 0.02
Settling Time (ms)   X- & Y-axes   Z-axis	8 3	10 5	15 2	15 5
Capacitance (µF)   X- & Y-axes   Z-axis	4.8 3.1		7.5 3.1	7.5 1.9
Integrated Sensor	Capacitive		Capacitive
Controller	LC.403
Notes	* Open-loop Travel operating at -30 to 150 V

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