Triple-Axis Nanopositioners (Deep Z-motion)

XYZ nanopositioning piezo stages with deep Z-motion   

nPoint Triple Axis Nanopostioners (Up to 135 µm Z-motion)   

This range of nPoint 3-axis piezo stages operate with up to 135 µm of Z-motion in open loop mode, and incorporate a unique flexure-guided design to ensure high resonant frequencies while minimising orthogonality and cross-talk errors.

nPoint's nanopositioners are especially designed for numerous motion critical applications. These include scanning and position control in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing.

Flexible DSP controllers enable easy optimisation and configuration of piezo systems for a variety of applications.

XYZ Models	NPXY100 Z50-244	NPXY200 Z50-270	NPXY100 Z100-135	NPXY200 Z100-271
Up to 135 µm of open loop Z-motion
Key features:	Large aperture XYZ nanopositioning piezo stages developed for scanning probe and optical microscopy applications
Footprint (mm)	140 x 140
Height (mm)	38
Aperture (mm)	68 x 68
Body Material	Aluminium
Maximum Load (kg)	5
Stage Mass (kg)	1.09	1.06	0.95	0.99
Max Push/Pull Force (N)	100/20
Closed-loop Travel (µm)   X- & Y-axes:   Z-axis:	100 50	200 50	100 100	200 100
Open-loop Travel* (µm)   X- & Y-axes:   Z-axis:	160 80	240 80	175 135	240 135
Position Noise (nm)   X- & Y-axes   Z-axis	0.3 0.3	0.7 0.3	0.3 0.3	0.7 0.3
Stiffness (N/µm)   X-axis   Y-axis   Z-axis	1.6 1.6 4.7	1.0 1.8 4.7	1.3 1.3 5.6	1.5 2.0 5.6
Resonant Freq. (kHz)   X- & Y-axes   Z-axis	0.50 0.55	0.45 0.55	0.50 0.50	0.45 0.50
Linearity Deviation (%)   X- & Y-axes   Z-axis	0.01 0.05	0.01 0.02	0.01 0.05	0.01 0.02
Settling Time (ms)   X- & Y-axes   Z-axis	10 10	15 10	10 10	15 10
Capacitance (µF)   X- & Y-axes   Z-axis	4.8 4.8	7.5 4.8	4.8 5.5	7.5 5.5	2
Integrated Sensor	Capacitive
Controller	LC.403
Notes	* Open-loop Travel operating at -30 to 150 V

Standard stage materials are listed. Other materials, including invar, super invar, stainless steel, titanium, and aluminum, are available for some stages. UHV configurations are also available in most products. Please enquire if interested in these options.

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