Single-Axis Nanopositioners

Compact single-axis nanopositioning piezo stages   

nPoint Single Axis Nanopositioners   

nPoint offer a range of piezo-driven flexure-guided nanopositioners that can be used in a wide variety of environments including ultra-high vacuum (UHV).

Engineered for motion critical applications, nPoint nanopositioning systems are used in nanolithography, atomic force microscopy (AFM), biophysics, and optical focusing among others. Their unique design ensures high resonant frequencies yet minimised orthogonality and cross-talk errors.

Feedback sensors within the stages ensure superb motion linearity and positioning accuracy, and the dedicated 400 series DSP controllers allow easy optimisation of piezo system response times and flexibility in programming for specific applications.

X-Axis Models	NPX 25-105	NPX 60-223	NPX 100	NPX 300	NPX 600
Key features:	Ultra-fast	Fast Sub-nm	Sub-nm	Sub-nm	Sub-nm
Footprint (mm) [W x D]	62 x 40	70 x 60	40 x 40	50 x 50	60 x 60
Height (mm)	18.5	25	15	15	15
Body Material	Aluminium		Stainless Steel
Maximum Load (kg)	1
Max Push/Pull Force (N)	100/20
Stage Mass (kg)	0.12	0.23	0.12	0.18	0.23
Closed-loop Travel (µm)	25	60	100	300	600
Open-loop Travel* (µm)	40	90	130	360	700
Position Noise (nm)	0.1	0.2	0.3	1	2
Stiffness (N/µm)	23	3.7	0.8	0.3	0.1
Resonant Freq. (kHz)	4	1.20	1	0.44	0.31
Settling Time (ms)	2	4	3	10	25
Linearity Deviation (%)	0.01
Capacitance (µF)	1.7	2.0	1.6	2.6	6.5
Integrated Sensor	Capacitive
Controller	LC.400
Notes	* Open-loop Travel operating at -30 to 150 V

Off the shelf stage materials are listed in these specifications, and UHV compatibility is available on most nPoint products, Do note that some stages can be also be manufactured in Invar, Super Invar, stainless steel, titanium or aluminium, so please contact for details if you are interested in one or more of these options.

Z-Axis Models	NPZ 25-206	NPZ 70-207	NPZ 100-209	NPZ 300-222
Key features:	Compact Ultra-fast	Compact	Slide holder	Large aperture 128.6 x 86.5
Footprint (mm) [WHD]	20 dia.	20 dia.	117.5 x 108.5	220 x 135
Height (mm)	44	85	14	27.4
Body Material	Super Invar		Aluminium
Maximum Load (kg)	1	1	0.3	1
Max Push/Pull Force (N)	100/20	100/20	20/10	50/20
Stage Mass (kg)	0.09	0.18	0.10	0.68
Closed-loop Travel (µm)	25	70	100	300
Open-loop Travel* (µm)	40	100	130	400
Position Noise (nm)	0.1	0.5	3	3
Stiffness (N/µm)	20	11	0.2	0.8
Resonant Freq. (kHz)	4	2	0.4	0.16
Settling Time (ms)	2	5	15	25
Linearity Deviation (%)	0.01	0.01	0.05	0.5
Capacitance (µF)	1.6	4.8	1.2	6.7
Integrated Sensor	Capacitive		Strain Gauge
Controller	LC.400
Notes	* Open-loop Travel operating at -30 to 150 V

nPoint website